METHOD OF CONTROLLING MACHINING AMOUNT OF ELECTROLYTIC MACHINING, AND ELECTROLYTIC MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of controlling the machining amount in electrolytic machining by which a conductive film is uniformly removed while confirming the removing degree of the conductive film under electrolytic machining to eliminate insufficient machining or over machining of the conductive film in the removal of the conductive film on the surface of the wafer by electrolytic grinding, and an electrolytic machining apparatus.;SOLUTION: The electrolytic machining apparatus 1 includes a conductive film M color change detecting means 19 for detecting the change of the color in a machining boundary part S between the conductive film M removed area and the unremoved area of the wafer W with the progress of the electrolytic machining as an electric signal, a controller for calculating a machining boundary position and machining progress rate of the conductive film M on the basis of the color change detected in the conductive film color change detecting means 19, and a monitor for displaying the machining boundary position and the machining progression rate calculated in the controller. The conductive film M is removed by a machining head 3 moving from the center ○ toward the outer periphery of the wafer W. The electrolytic machining amount is controlled by monitoring the machining boundary position and the machining progression rate of the conductive film M during the removal machining.;COPYRIGHT: (C)2009,JPO&INPIT