COMPOUND MICROSCOPE OF TRANSMISSION ELECTRON MICROSCOPE AND NEAR-FIELD OPTICAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To achieve a compound microscope enabling to perform a near-field optical microscope observation under a structural observation of a transmission electron microscope capable of discriminating atoms with the intention to solve the low resolution problem of the near-field optical microscope in a structural observation.;SOLUTION: A near-field optical microscope 36 is installed in a sample chamber 35 of a transmission electron microscope 34 and controlled by a computer 9 for the use of control/image display. The near-field optical microscope 36 comprises a light source 38, a sample mounting 23 equipped with a board 6 supporting a sample 2, a means connected with the light source to emit light to the sample 2, a light receiving means, spectroscopic means of the near-field light from the sample 2 and a means to scan the light receiving means to the sample 2 relatively. Therefore, the lattice image observation by the transmission electron microscope of the sample 2 can be done and the spectroscopic analysis of the corresponding lattice image can be done also.;COPYRIGHT: (C)2008,JPO&INPIT