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PHOTOTOOL FOR SOLDER RESIST EXPOSURE AND SOLDER RESIST PATTERN FORMING METHOD IN WHICH EXPOSURE PROCESSING IS PERFORMED USING THE SAME
PHOTOTOOL FOR SOLDER RESIST EXPOSURE AND SOLDER RESIST PATTERN FORMING METHOD IN WHICH EXPOSURE PROCESSING IS PERFORMED USING THE SAME
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机译:在使用相同的曝光处理的情况下进行防焊曝光的光敏抗蚀剂和形成防焊图案的方法
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摘要
PROBLEM TO BE SOLVED: To provide a phototool for exposure processing of solder resist with which a high-resolution resist pattern can be formed with good reproducibility regardless of the thickness of a solder resist layer and the influence of a blue pigment, and to provide a solder resist pattern forming method in which exposure processing is performed using the phototool, and a photosensitive composition suitable for use in the forming method.;SOLUTION: The phototool is used in exposure processing in pattern formation of solder resist and has a photomask, wherein the phototool cuts off ≥50% of light of ≤370 nm and transmits ≥80% of light of ≥400 nm.;COPYRIGHT: (C)2008,JPO&INPIT
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