Way to eliminate the low-frequency error source for critical dimension uniformity in the shaped beam writing system

摘要

Method and system for generating a flash in the substrate. The method, at least one receiving a figure of more than one pattern to be printed on the substrate includes the step of decomposing in a substantially rectangular shape at least four each figure, the substantially rectangular shape of the four are separated by a vertical boundary and at least one horizontal boundary of Tsu. The method further includes the step of generating a flash in a substantially rectangular shape so that each image in the same aperture each edge of each figure. [Selection Figure Figure 3