PLOT DATA GENERATING METHOD AND STORAGE MEDIUM STORING PLOT DATA FILE

摘要

PROBLEM TO BE SOLVED: To provide plot data having excellent processing efficiency, and to provide its generating method.;SOLUTION: In the plot data generating method for plotting by the use of charged particle beams from design data of a circuit, the plot data generating method comprises: a first data file generating step of generating a first data file containing size data indicating a size of a cell constituted of at least one figure and pattern data of the cell as a part of plot data; and a second data file generating step of generating a second data file containing arrangement position data indicating an arrangement position of the cell and the size data of the cell as a part of the plot data.;COPYRIGHT: (C)2009,JPO&INPIT