SAMPLE HOLDER, SAMPLE INSPECTION METHOD, SAMPLE INSPECTION DEVICE, AND SAMPLE INSPECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a sample holder, a sample inspection method, a sample inspection device, and a sample inspection system allowing sample inspection to be efficiently carried out by selecting a constituent in a sample, and allowing the sample inspection to be carried out well.;SOLUTION: This sample holder having a sample holding space 55 arranged between an electron beam-permeable film 11 and a base 12 facing to the film, and supply passages 54 used for supplying a sample to the sample holding space 55 is provided, in at least either of the supply passages 54 and the sample holding space 55, with a filter structure separating a constituent in the sample. In addition, the sample holder having a sample holding space arranged between two electron beam-permeable films arranged oppositely to each other, and the supply passages for supplying the sample to the sample holding space is provided, in at least either of the supply passage and the sample holding space, with a filter structure separating a constituent in the sample.;COPYRIGHT: (C)2008,JPO&INPIT