APPARATUS TO CHARACTERIZE ANGLE-RESOLVED SPECTROSCOPY LITHOGRAPHY AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus to characterize angle-resolved spectroscopy lithography and a method of manufacturing a device.;SOLUTION: In order to inspect all the parts of a substrate, it is possible for a substrate table to make a rotational movement and a linear movement. In addition, a detector can make a rotational movement. Owing to this, it is made possible to inspect all the parts of a substrate surface from every angle in a plane parallel to the substrate. Because it is required to reduce the linear movement, the space required for the apparatus is small and the vibrations are small.;COPYRIGHT: (C)2008,JPO&INPIT