LIFE PREDICTION METHOD OF HEATER ELEMENT WIRE, HEAT TREATING DEVICE, RECORD MEDIUM, AND LIFE PREDICTION TREATING SYSTEM OF HEATER ELEMENT WIRE

摘要

PPROBLEM TO BE SOLVED: To predict a life of a heater element wire more accurately than conventionally by utilizing data of a period during which a sign of heater element wire disconnection is apt to appear (for example, temperature elevation period), when predicting the life in advance before the heater element wire used in a heat treatment device is disconnected. PSOLUTION: In the temperature elevation period during which the heater element wire is supplied with electric power and elevated to the heat-treatment temperature prior to heat-treatment of a wafer, the maximum value of the electric power magnitude supplied to the heater element wire is detected and an index indicating the magnitude of the electric power amplitude is obtained. In the case these indice to indicate the magnitude of the electric power and the magnitude of the electric power amplitude exceed respective threshold values, it is informed that the service life of the heater element is close to its life end. PCOPYRIGHT: (C)2009,JPO&INPIT