METHOD FOR FORMING ZIRCONIA FILM, METHOD FOR COVERING CUTTING TOOL FOR HARD ALLOY, AND CUTTING TOOL FOR HARD ALLOY

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a zirconia film with the use of a thermal plasma CVD technique.;SOLUTION: The method for forming the zirconia film includes supplying water to a plasma flame when forming the zirconia film on the surface of a substrate with the thermal plasma CVD technique, while using a metal alkoxide solution containing zirconium alkoxide as an essential component, as a raw material.;COPYRIGHT: (C)2008,JPO&INPIT