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The control which uses the variable magnetic field of melt - solid boundary form of the silicon crystal which grows
The control which uses the variable magnetic field of melt - solid boundary form of the silicon crystal which grows
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机译:利用可变磁场的磁场控制-生长的硅晶体的固态边界形式。
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摘要
It is method and the system in order to control the grain growth inside the Czochralski method grain growth device. Applying the magnetic field inside the grain growth device, it changes the form of the melt - solid boundary where it can pull up from the melt the ingot and controls. Form of the melt - solid boundary corresponding to the magnetic field which it changes as a function of length of the ingot, makes form of desire.
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