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The control which uses the variable magnetic field of melt - solid boundary form of the silicon crystal which grows

机译:利用可变磁场的磁场控制-生长的硅晶体的固态边界形式。

摘要

It is method and the system in order to control the grain growth inside the Czochralski method grain growth device. Applying the magnetic field inside the grain growth device, it changes the form of the melt - solid boundary where it can pull up from the melt the ingot and controls. Form of the melt - solid boundary corresponding to the magnetic field which it changes as a function of length of the ingot, makes form of desire.
机译:该方法和系统是为了控制切克劳斯基方法内的晶粒长大装置内的晶粒长大。在晶粒生长装置内部施加磁场,它会改变熔体的形式-固体边界,在该处可以从熔体中拉出晶锭并进行控制。熔体的形式-对应于磁场的固体边界,它根据铸锭的长度而变化,形成了一种理想的形式。

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