The time based null tuning fork resonator which has the micro mechanical tuning fork

摘要

The resonator (4) and driving the said resonator (4), it vibrates, the accumulation electronic circuit which responding to the said vibration, forms the signal which possesses the frequency which is decided the time base which it has (3) is stated. In order substantially inside parallel plane surface to vibrate according to 1st mode of vibration for the resonator the baseplate (2) to be supported on, vis-a-vis the said baseplate (2), it conformed the micro mechanical tuning fork resonator which was accumulated (4) is. The tuning fork resonator, the based component which extends substantially vertically from the baseplate (2) is connected by (5) and the based component, substantially the parallel fork condition blade (7 and 8) the free standing vibrating structure which at least includes 1st group (6) and the fork condition blade (7 and 8) adjoins and is arranged, the electrode structure which is connected to the accumulation electronic circuit (3) (9) with has.