INCLINATION ANGLE SENSOR OF STATIC CAPACITANCE TYPE

摘要

PROBLEM TO BE SOLVED: To provide an inclination angle sensor of static capacitance type, the detection precision of which can be highly maintained and also reduction of response speed is never occurred, in addition capable of being economically manufactured.;SOLUTION: The inclination sensor comprises: a liquid accommodation cavity 18 provided with a pair of internal walls which are opposite to each other in front and rear sides; and a pair of left and right upper electrodes 12a, 12b and a lower electrode 11 provided on the pair of internal walls. The inclination of a liquid surface 2a of an oil 2 accommodated in the liquid accommodation cavity 18 is converted into the difference of the static capacitance of the left and right pair capacitors formed with a pair of left and right upper electrodes 12a, 12b and the lower electrode 11; thereby an inclination angle θ of the installation position of a sensor 1 can be detected. In the surface region of the lower electrode 11 where the liquid surface 2a of the oil 2 are crossing, a plurality of grooves 11a, 11a, etc., are provided on coaxial circles 11a' centering an inclination center 100, and each groove 11a accepts a part of oil 2.;COPYRIGHT: (C)2008,JPO&INPIT