METHOD OF MANUFACTURING ANTIREFLECTION STRUCTURAL BODY, MOLDING DIE USING ANTIREFLECTION STRUCTURAL BODY AND METHOD OF MANUFACTURING GLASS FORMED ARTICLE OR RESIN MOLDED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an antireflection structural body easily and inexpensively.;SOLUTION: An X-ray sensitive film 11 is formed on a substrate 10. A plurality of particulate bodies 12 which shield X-ray are arranged on the X-ray sensitive film 11 with a pitch of light wavelength or less where light reflection is suppressed by a light reflection preventive rugged structure. The X-ray sensitive film 11 is irradiated with X-ray from above a mask layer 15, and then developed, thereby the X-ray sensitive film 11 is patterned into a prescribed pattern. The substrate 10 is etched from above the patterned X-ray sensitive film 11, thereby, the light reflection preventive rugged structure is formed on the substrate 10 for obtaining the antireflection structural body 1.;COPYRIGHT: (C)2008,JPO&INPIT