FAULT ANALYSIS ASSISTANCE DEVICE AND FAULT ANALYSIS ASSISTANCE METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a fault analysis assistance device and a fault analysis assistance method suitable for efficiently carrying out analysis of a fault cause. PSOLUTION: A log file information acquisition and determination processing part 53 determines whether or not predetermined error information is included in a log file outputted by an inspection control application 4. In a log file/image plane information recording processing part 55, if it is determined that error information is included in the log file, both the log file, and information of an image displayed by a display device 2 are recorded in a recording medium. PCOPYRIGHT: (C)2008,JPO&INPIT