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Method and apparatus for calibrating an electromagnetic measurement device

机译:用于校准电磁测量装置的方法和设备

摘要

Method and apparatus for measuring an electromagnetic radiation response characteristics related to the (210) substrate, to calibrate the electromagnetic measuring device (100) is disclosed. Apparatus and method, a second electromagnetic wave to generate an electromagnetic wave, is generated through the first polarization filter, is reflected in the substrate and disposed arrangement poles intersects to the polarization filter of the first After passing through a polarizing filter, to capture a portion of the electromagnetic wave. In addition, the device captures the electromagnetic waves reflecting in standard calibration of one or more passes through the filter attenuation. Digital data is determined from the electromagnetic wave that has been captured. Device is re-calibrated using the digital data.
机译:公开了用于测量与(210)基板有关的电磁辐射响应特性以校准电磁测量装置(100)的方法和设备。装置和方法,通过第一偏振滤光片产生第二电磁波以产生电磁波,该电磁波在基板中反射并且布置的布置极与第一偏振滤光片的偏振滤光片相交。电磁波。另外,该设备捕获通过滤波器衰减的一个或多个通过的标准校准中反射的电磁波。根据已捕获的电磁波确定数字数据。使用数字数据重新校准设备。

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