METHOD OF MANUFACTURING MICROLENS FOR COLOR IMAGING ELEMENT AND MICROLENS ARRAY FOR COLOR IMAGING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a microlens for a color imaging element by which manufacture cost can be reduced without lowering optical performance of the microlens directly formed on a color filter and to provide a microlens array which can sufficiently function between adjoining microlenses.;SOLUTION: In the method of manufacturing the microlens for the color imaging element, a color filter layer 18 is formed on a flattening layer 16 formed on a photoelectric conversion element 12 in a semiconductor substrate 10 of the imaging element 14, then a photosensitive lens material layer 20 is formed on the filter layer. The lens material layer is subjected to pattern exposure by using a photomask 24 with controlled transmittance distribution so that microlenses 22g, 22b and 22r may be formed on the corresponding photoelectric conversion element after development and then is subjected to development and hardening to form the microlens on the corresponding photoelectric conversion element. The microlens array 28 containing a plurality of the microlenses is manufactured by the above-mentioned manufacturing method.;COPYRIGHT: (C)2008,JPO&INPIT