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Functionally graded dielectric layer deposition method by chemical vapor deposition using viscous precursors
Functionally graded dielectric layer deposition method by chemical vapor deposition using viscous precursors
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机译:使用粘性前体的化学气相沉积功能分级介电层沉积方法
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摘要
A method of forming a graded dielectric layer on an underlying layer including flowing a mixture of a silicon-carbon containing gas, an oxygen containing gas and a carrier gas through a showerhead comprising a blocking plate and a faceplate to form an oxide rich portion of the graded dielectric layer, where the silicon-carbon containing gas has an initial flow rate, flowing the silicon-carbon containing gas at a first intermediate flow rate for about 0.5 seconds or longer, where the first intermediate flow rate is higher than the initial flow rate, and flowing the silicon-carbon containing gas at a fastest flow rate higher than the first intermediate flow rate to form a carbon rich portion of the graded dielectric layer.
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