Through 1st ascent and descent axial sending mechanism to the column

摘要

PROBLEM TO BE SOLVED: To provide a method for easy positioning.;SOLUTION: A contact sensitive electrode 9B to make contact with a lower end surface of an electrode lower guide 21 is provided, an electrode head end is positioned on a lower guide lower end surface by contacting and detecting a head end of a pore processing electrode 18 to insert into the electrode lower guide 21, the pore processing electrode 18 is lowered by specified length from the electrode lower guide 21 by a processing axis, thereafter, the electrode head end and a surface of a processing body 1 are made contact with each other and sensed by lowering a guide axis, furthermore, the pore processing electrode 18 is pulled up by a length slightly smaller than specified length by a processing Z axis and the guide axis is lowered by a length further slightly smaller than the length slightly smaller than the specified length.;COPYRIGHT: (C)2004,JPO&NCIPI