TARGET HOLDER AND TARGET HOLDING METHOD

摘要

PROBLEM TO BE SOLVED: To suppress the propagation of heat to a target and prevent the elution of a material from a target holder to the target.;SOLUTION: The target holder 1 is provided with a target holding part 2 for holding the target 12 to be a target sample for a laser beam in laser ablation and a holder supporting part 3 connected to the target holding part 2 and rotated or rectilinearly moved by a rotating and moving mechanism, wherein the target holding part 2 is provided with a recessed part 2a for housing the target 12 and a first hollow part for housing the holder supporting part, and the holder supporting part 3 is provided with a second hollow part 3a formed therein and a cooling mechanism for circulating a coolant 4 to the second hollow part 3a to cool the target 12.;COPYRIGHT: (C)2008,JPO&INPIT