Floating positioning equipment, parts conveying device and component inspection equipment has a floating positioning device

摘要

PROBLEM TO BE SOLVED: To provide a floating centering device that has a simple structure and can center the position of a second member to a first member by reliably retaining the second member to the first member so that it can be floated in a face direction, and to provide a component conveying apparatus and a component inspecting apparatus having the floating centering device.;SOLUTION: The floating centering device 110 comprises an elastic deformation member 200 that can be elastically deformed while being fixed to a first member 91; a guide member 201 having a hollow shape fixed to a second member 92; and a spherical support member 203 that is the spherical support member 203 that is fixed to the free end of the elastic deformation member and inscribes to the inner surface of the guide member, gives the degree of freedom of the travel of the second member 92 in the face direction by the elastic deformation of the elastic deformation member when the second member 92 travels in the face direction orthogonally crossing the axial direction of the guide member to the first member 91, and centers the position of the second member 92 to the first member 91 by the restoring force of the elastic deformation member while no external force is being applied to the second member 92.;COPYRIGHT: (C)2005,JPO&NCIPI