FLOATING CONVEYING DEVICE, FLOATING CONVEYING UNIT USING FLOATING CONVEYING DEVICE, AND FLOATING CONVEYING METHOD USING FLOATING CONVEYING UNIT

摘要

PROBLEM TO BE SOLVED: To provide a floating conveying device capable of adjusting the injection direction of pressure gas by rotating a nozzle member in a horizontal surface with respect to a base section.;SOLUTION: Pressure gas supplied from a supply section to the base section 21 of a conveying section 20 is injected from a nozzle 22d formed in a nozzle member 22 through the nozzle member 22 held rotatably in the horizontal surface on the base section 21 while a communication state with the base section 21 is kept. A plate-like conveyed body is floated and conveyed in a predetermined direction by the pressure gas injected from the nozzle 22d.;COPYRIGHT: (C)2005,JPO&NCIPI