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Defect inspection method and defect inspection apparatus of the gray-tone mask, as well as defect inspection of photomask method and defect inspection equipment
Defect inspection method and defect inspection apparatus of the gray-tone mask, as well as defect inspection of photomask method and defect inspection equipment
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机译:灰阶掩模的缺陷检查方法和缺陷检查设备,以及光掩模方法的缺陷检查和缺陷检查设备
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摘要
PPROBLEM TO BE SOLVED: To provide a method and an apparatus for quickly and accurately inspecting defects in a gray tone mask having a light-shielding section, a light transmission section, and a gray tone section. PSOLUTION: In the defect inspection method for the gray tone mask having the light-shielding section, the light transmission section, and the gray tone section, a transmittance signal obtained by scanning a pattern in the mask is obtained for a region where at least the light-shielding section and the transmission section are formed, defects are detected by a comparison inspection method for detecting the defects by using the threshold of the pattern defects that is provided in advance regarding a pattern defect signal based on the comparison of patterns, and defects are detected by a method for detecting the defects by using a transmittance defect extraction threshold that is provided in advance for the transmittance signal that is obtained by scanning a pattern in the mask at least for the gray tone section. PCOPYRIGHT: (C)2004,JPO
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