Small-sized fluid cooling heat sink of one somatotype heater attachment

摘要

Topic There are times when the temperature control control equipment which includes the small-sized fluid cooling heat sink which possesses one somatotype heater and the inspection component is offered.SolutionsThe temperature control control equipment which includes the small-sized fluid cooling heat sink which possesses one somatotype heater and the inspection component, is used as one part of the system which offers the temperature surface which is controlled to electronic equipment such as semiconductor device while the test. The temperature control control equipment, in order from the device to offer thermal route to the suffering measurement device, includes the interface aspect which is formed. The device of this kind, in 1st plane surface the 1st heat transfer section, possesses the fluid cooling heat sink which includes the 2nd heat transfer section in 2nd plane surface. The 1st and 2nd heat transfer section establishes 3 dimensional cross flow of the refrigerant inside heat sink structure. With form of execution of other things, the parallel fluid tube is included, but the respective fluid tube 3 possesses 3 dimensional micro channel structure which dimensionally induces the refrigerant passage inside fluid derived. Passing by the fluid tube which the refrigerant adjoins, it flows to opposite direction, it brings 3 dimensional cross flow inside heat sink structure with that. Selective figure Figure 1