Modulation frequency characteristic measuring apparatus and measurement method of the photodetector

摘要

PPROBLEM TO BE SOLVED: To provide a method for measuring accurately the frequency characteristic of a detector for light to be measured without using a reference photodetector, and its measuring device. PSOLUTION: Light from a light source 9 is intensity-modulated by external modulators 10, 11 driven by an oscillator 12, and the detector 14 for the light to be measured is irradiated therewith, and the intensity of the light detected by the detector 14 is converted into an electric signal, to thereby measure the intensity by a frequency analyzer. In this case, only confirmation that the modulation characteristic of the light source 9 or the external modulators 10, 11 can work in an object frequency range is required, and the accurate modulation characteristic is not required to be known. PCOPYRIGHT: (C)2005,JPO&NCIPI