High frequency electric characteristics measuring method and apparatus for electronic components, calibration method for high-frequency electrical characteristic measurement apparatus

摘要

Opposite ends of a transmission line (12) having known electric characteristics per unit length are connected, respectively, with measuring ports of a network analyzer (20), the transmission line (12) is shunted with short chips (10) at at least three points in the longitudinal direction, electric characteristics are measured under total reflection state, and error factors of the measuring system including the transmission line (12) are calculated. Electric characteristics are measured while shunting the transmission line (12) with an electronic component (15) to be measured, and error factors of the measuring system are removed from the measurements of the electronic component (15) to be measured, thus determining the true values of the electric characteristics of the electronic component (15) to be measured. A high-precision high-frequency electric characteristics measuring method for a two-terminal electronic component insusceptible to a variation in connection can thereby be realized.