Rag meter and its production mannered null micro rag meter unit floatation cell where multi level is not cooled

摘要

Microbolometer unit cell 10, a flat intermediate level virtually on the detection structure 24 and the incident radiation absorption of the flat upper level virtually defines an optical resonant cavity between them are separated from the detection and structure incident radiation absorption of the higher-level and radiation reflecting structure 26, is separated from the radiation reflecting structure of the intermediate level, the flat low-level virtually, which is electrically coupled to the detection and structure incident radiation absorption of the upper level, and the readout circuit which is located under I contains 20 thermal isolation leg structure. Thermal isolation leg structure of the lower level are electrically coupled to the sensing arrangement and incident radiation absorption in the upper level by 44 legs through the opening 48 of the radiation reflection structure of the intermediate level, the legs also structural I serve as a member supporting Na. Thermal isolation leg structure of the lower level are electrically coupled to the readout circuit through the legs 18 of the other terminating in electrical contacts disposed on the readout integrated circuit 12 located below, the radiation of the intermediate level reflection structure is supported by the extension of the legs 18A. Sensing arrangement and incident radiation absorption higher level within the scope of the invention that includes a reinforcing member 50 of the frame-like member or the like disposed one around the detection structure surrounding and incident radiation absorption of higher-level there. Resonant optical cavity is defined by a distance that is a function of the wavelength of the incident radiation, the unit cell that is placed adjacent the unit cell array is provided with a resonant optical cavity having a different spacing, to increase the sensitivity for different wavelengths thereby . [Selection] Figure Figure 1