The single electronic tunnel component which has the lamination structure where number of layers is

摘要

PROBLEM TO BE SOLVED: To improve the reliability of a single-electron tunnel element, whose working accuracy is at a specific dimension or lower by using a copper oxide superconductor, having a laminated crystal structure composed of an electrically conducting layer and of a tunnel barrier layer. ;SOLUTION: Fifty layers of electrically conducting layers 11 and tunnel barrier layers 12 are formed between an electrode A and an electrode B. Even if an area S and a temperature T are made large, the condition of a single- electron tunnel is satisfied, by satisfying a prescribed conditional expression in which the number N of layers is increased. Consequently, even if a very small electrode of about 1 μm2 which can be easily realized by a present working technology is used, the condition of the single-electron tunnel can be satisfied sufficiently, by causing the number N of layers to increase to have N50. Thereby, it is possible to obtain a single-electron tunnel element, which has a working accuracy of 0.1 μm2 or lower and which has a laminated structure of high reliability.;COPYRIGHT: (C)2000,JPO