Single-Sided Apparatus For Manipulating Droplets By Electrowetting-On-Dielectric Techniques

摘要

A single-sided electrowetting-on-dielectric apparatus, which is useful for microfluidic laboratory applications, is disclosed. The apparatus comprises a substrate, an array of control electrode elements disposed on the substrate, a first dielectric film disposed on, and overlaying, the substrate and tie array of control electrode elements, at least one ground electrode element disposed on the first dielectric film, a second dielectric film disposed on, and overlaying, the first dielectric film and the at least one ground electrode element, and an electrowetting-compatible surface film disposed on the second dielectric film. A method of making the apparatus is also disclosed.