Two-Dimensional Adaptive Accelerometer Based on Dielectrophoresis

摘要

Conventional accelerometers are based on test masses that are suspended in some kind of spring damper system. According to an exemplary embodiment of the present invention, a two-dimensional adaptive accelerometer based on dielectrophoresis is provided, which measures an acceleration of a test mass freely floating in a medium by determining the movement of the test mass due to an accelerating force acting on the test mass. A non-uniform electric force field provides for a wide and adjustable dynamic range.