Phase Plate For Phase-Contrast Electron Microscope, Method For Manufacturing the Same and Phase-Contrast Electron Microscope

摘要

A phase plate (10) for phase-contrast electron microscopes is characterized by comprising a conductive core phase plate (14) which has a phase plate body (11) and a phase plate support (12) supporting it and is arranged in the path of electrons having passed through the objective lens of an electron microscope and in which the phase plate body (11) is so supported on the phase plate support (12) having an opening (13) as to cover at least a part of the opening (13) and a conductive shield thin film (15) covering the periphery of the core phase plate (14) including the upper and lower sides thereof. Consequently, a phase plane for phase-contrast electron microscopes preventing the lens effect incident to charging completely and applicable to the field of material science, its manufacturing method and a phase-contrast electron microscope can be provided.