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Manufacturing method of actuator device and liquid jet apparatus provided wirth actuator device formed by manufacturing method of the same
Manufacturing method of actuator device and liquid jet apparatus provided wirth actuator device formed by manufacturing method of the same
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机译:致动器装置的制造方法及具有该致动器装置的液体喷射装置的宽度致动器装置
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摘要
A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
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