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METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR PRODUCT RANDOMIZATION AND ANALYSIS IN A MANUFACTURING ENVIRONMENT

机译:制造环境中产品随机化和分析的方法,系统和计算机程序产品

摘要

Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.
机译:提供了用于在制造环境中实施产品随机化和分析的方法,系统和计算机程序产品。一种方法包括在处理设备处使用随机化技术选择多个批次中的每个产品来处理多个批次的产品。该方法还包括针对过程配方中的每个操作生成操作标识记录,该操作标识记录包括针对每个操作将与随机选择的产品相关联的槽位标识符映射到过程变量标识符,过程工具和操作。该方法还包括使用用于产品载体的槽位标识符来定义槽位组,以及通过分析每个槽位组的历史产量来识别产品产量模式。该方法还包括通过分析来自与多个批次相对应的操作标识记录的产品产量,确定工艺配方中每个操作的一个或多个产品产量模式的出现频率。

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