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Method of fabricating a planar spiral inductor structure having an enhanced Q value
Method of fabricating a planar spiral inductor structure having an enhanced Q value
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机译:具有增强的q值的平面螺旋电感器结构的制造方法
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摘要
Within a method for fabricating an inductor structure there is first provided a substrate. There is then formed over the substrate a planar spiral conductor layer to form a planar spiral inductor, wherein a successive series of spirals within the planar spiral conductor layer is formed with a variation in at least one of: (1) a series of linewidths of the successive series of spirals; and (2) a series of spacings of the successive series of spirals. The method contemplates a planar spiral inductor structure fabricated in accord with the method. A planar spiral inductor structure fabricated in accord with the method is characterized by an enhanced Q value of the planar spiral inductor structure.
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