Target for transparent conductive thin film, transparent conductive thin film and manufacturing method thereof, electrode material for display, organic electroluminescence element and solar cell

摘要

The target for the transparent conductive thin film having indium oxide as its major component and containing tungsten and/or molybdenum, obtained by forming a body of indium oxide powder, and tungsten oxide power and/or molybdenum oxide powder and then heating or sintering the formed body such that the thin film after sputtering has indium oxide as the main component and contains tungsten and/or molybdenum with an atomic ratio (W+Mo)/In of 0.0040 to 0.0470, whereby a transparent conductive thin film having excellent surface smoothness and low specific resistance of 6.0×10⁻⁴ Ω·cm or less, and whose surface smoothness and specific resistance properties do not change even when heated at 170° C. is provided.