DROPLET DISCHARGE HEAD, DROPLET DISCHARGE DEVICE, METHOD FOR MANUFACTURING DROPLET DISCHARGE HEAD AND METHOD FOR MANUFACTURING DROPLET DISCHARGE DEVICE

摘要

A droplet discharge head, including:a nozzle substrate having a nozzle opening, the nozzle opening being provided in a plural number;a cavity substrate having a discharge chamber that communicates the nozzle opening and discharges a droplet from the nozzle opening, the discharge chamber is provided in a plural number, and each of the discharge chambers independently communicating with the corresponding nozzle opening;a reservoir substrate having a reservoir concave portion that serves as a reservoir which communicates commonly with the discharge chambers, the reservoir substrate being provided between the nozzle substrate and the cavity substrate; anda resin thin film formed on a whole inner face of the reservoir concave portion and on a bottom face of a second concave portion, the second concave portion being provided in a peripheral of the reservoir concave portion and having a depth smaller than a depth of the reservoir concave portion, wherein the resin thin film provided on the bottom face of the second concave portion is cut circularly so as to surround the reservoir concave portion, and a part of the resin thin film provided on a bottom face of the reservoir concave portion serves as a diaphragm buffering pressure variation.