Kelvin contact measurement device and kelvin contact measurement method

摘要

Stable Kelvin contact is made upon positional deviation of object. Force pins 12a and sense pins 12b contact with each ball terminal 51 of object 50 for measuring electric property. Force pins 12a and sense pins 12b are extendable and contractable and urged to ball terminal 51 by elastic member 13. Four force and sense pins correspond to one ball terminal. At least one force pin 12a and at least one sense pin 12b are arranged to come into contact with the one ball terminal 51. The object is positioned in concave portion 21 of lower socket 20. Force and sense pins are elastically supported by frame 11 of upper socket 10.