Ceramic oscillation flow meter having cofired piezoresistive sensors

摘要

An apparatus is provided for measuring the amount of fluid (21) flowing in a channel (18, 20). The apparatus comprises a fluidic oscillation flow meter (10) including a housing (14) defining an inlet (16) for receiving the fluid (21), and first and second diversion channels (18, 20) for alternately receiving the fluid (21) from the inlet (16). The housing (14) comprises a first nozzle (46) for receiving the fluid (21) from the first diversion channel (18) and deflecting the fluid (21) from the inlet (16) into the second diversion channel (20). A second nozzle (48) receives the fluid (21) from the second diversion channel (20) and alternately deflects the fluid (21) from the inlet (16) into the first diversion channel (18). A first layer of material (56) overlies at least one of the first and second diversion channels (18, 20) and includes a sensing area that distorts due to a pressure change caused by the fluid (21) flowing through the diversion channels (18, 20). A first sensing piezoresistor (62) is positioned on the layer of material (56) near the first diversion channel (18) for detecting the pressure change of the sensing area and generating a frequency signal.