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Sensing element used in sensing device for sensing target substance in specimen by using plasmon resonance
Sensing element used in sensing device for sensing target substance in specimen by using plasmon resonance
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机译:用于通过等离振子共振感测样本中的目标物质的感测装置中的感测元件
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摘要
A method of producing a sensing element used in a detecting device for detecting a target substance in a specimen with the use of plasmon resonance. The method includes the steps of forming an insulating layer on a substrate, the surface of the substrate having an electroconductive layer including a first electroconductive material, forming a plurality of holes through the insulating layer to form an insulating pattern, filling up the holes with a second electroconductive material to form a metallic pattern, removing the insulating pattern, and removing a region other than the region sandwiched by the metallic pattern and the substrate in the electroconductive layer, using the metallic pattern as a mask.
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