Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution

摘要

This invention concerns a device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between a convergent light cross-reflected analyser and polarizer, wherein the ellipsometric parameters of the ensemble formed by the sample and a substrate whereon it is placed, are processed. The substrate comprises a base and a stack of layers of base and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that the variations of the ellipsometric parameters of the sample are displayed with a contrast greater than the contrast produced in the absence of such substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.