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High density magnetic recording medium having uniform local coercivity distribution and grain size distribution and fine grains and manufacturing method thereof
High density magnetic recording medium having uniform local coercivity distribution and grain size distribution and fine grains and manufacturing method thereof
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机译:具有均匀的局部矫顽力分布和晶粒尺寸分布的高密度磁记录介质以及细晶粒及其制造方法
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摘要
Disclosed is herein a magnetic recording medium useful for high density magnetic recording, which contains an optimum composition of Pt so as to have a uniform local coercivity distribution and grain size distribution, and fine grains, and a method of manufacturing the same. The magnetic recording medium includes a 400 Å (Co82Cr18)100-xPtx/1100 Å Ti alloy thin film containing 1 to 14 atom % Pt. Additionally, the method includes a first step of layering a Ti thin film on a glass substrate, a second step of depositing a CoCrPt alloy thin film on the Ti thin film, and a third step of depositing Si3N4 on the CoCrPt alloy thin film. At this time, the CoCrPt alloy thin film contains a predetermined composition of Pt controlled by a CoCr alloy target having a Pt chip positioned thereon. Thereby, the magnetic recording medium having microscopic magnetic property and structural property suitable to a high density magnetic recording medium is realized.
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