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Resonance method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators
Resonance method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators
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机译:使用MEMS致动器确定扫描探针显微镜悬臂弹簧常数的共振方法
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摘要
In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.
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