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Non-axisymmetric charged-particle beam system
Non-axisymmetric charged-particle beam system
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机译:非轴对称带电粒子束系统
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摘要
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
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