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Exchange-coupled film, method for making exchange-coupled film, and magnetic sensing element including exchange-coupled film
Exchange-coupled film, method for making exchange-coupled film, and magnetic sensing element including exchange-coupled film
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机译:交换耦合膜,交换耦合膜的制造方法以及包括该交换耦合膜的磁传感元件
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摘要
An exchange-coupled film includes a seed layer, an antiferromagnetic layer, and a ferromagnetic layer. The seed layer is formed at a thickness that is larger than the critical thickness, and the thickness of the seed layer is then decreased by etching so as to be smaller than or equal to the critical thickness. Thereby, a crystalline phase which extends through the seed layer from the upper surface to the lower surface can be formed, and/or the average size, in a direction parallel to the layer surface, of the crystal grains in the seed layer can be set to be larger than the thickness of the seed layer. Consequently, a large exchange coupling magnetic field Hex can be generated between the antiferromagnetic layer and the ferromagnetic layer.
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