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Current-perpendicular-to-the-plane spin-valve (CPP-SV) sensor with current-confining apertures concentrated near the sensing edge

机译:垂直于平面的电流自旋阀(CPP-SV)传感器,其电流限制孔集中在感应边缘附近

摘要

A current-perpendicular-to-the-plane spin-valve (CPP-SV) magnetoresistive sensor has an insulating layer with at least one aperture that confines the flow of sense current through the active region. The apertures are located closer to the sensing edge of the sensor than to the back edge of the sensor. The aperture (or apertures) are patterned by e-beam lithography, which enables the number, size and location of the apertures to be precisely controlled. The insulating layer may be located inside the electrically conductive nonmagnetic spacer layer, or outside of the magnetically active layers of the spin-valve. More than one insulating layer may be included in the stack to define conductive current paths where the apertures of the insulating layers overlap. The apertures are filled with electrically conductive material, typically the same material as that used for the spacer layer.
机译:一种电流垂直于平面的自旋阀(CPP-SV)磁阻传感器具有绝缘层,该绝缘层具有至少一个孔,该孔限制了通过有源区域的感应电流的流动。孔的位置比传感器的后边缘更靠近传感器的感应边缘。通过电子束光刻对孔(或多个孔)进行图案化,这使得能够精确地控制孔的数量,尺寸和位置。绝缘层可以位于导电非磁性间隔层的内部,或者位于旋转阀的磁性活性层的外部。堆叠中可包括不止一个绝缘层,以限定绝缘层的孔重叠的导电电流路径。孔填充有导电材料,该材料通常与用于间隔层的材料相同。

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