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Image data correction method, lithography simulation method, image data correction system, program, mask and method of manufacturing a semiconductor device
Image data correction method, lithography simulation method, image data correction system, program, mask and method of manufacturing a semiconductor device
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机译:图像数据校正方法,光刻模拟方法,图像数据校正系统,程序,掩模和半导体器件的制造方法
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摘要
An image data correction method includes preparing correction data for correcting a distortion of an image obtained by an image acquiring section, acquiring outline data of a desired pattern obtained by the image acquiring section, and correcting the outline data of the desired pattern using the correction data.
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