Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method

摘要

Light from a light source is split at a first splitter into a temperature measurement beam and a reference beam, the temperature measurement beam is further split at a second splitter into first through nth measurement beams, and the reference beam is reflected at a reference beam reflecting means. The first through nth measurement beams are radiated onto a temperature measurement target by ensuring that the optical path lengths of the first through nth measurement beams extending from the second splitter to the temperature measurement target are different from one another. By driving the reference beam reflecting means, the optical path length of the reference beam reflected at the reference beam reflecting means is altered, and concurrently, a light receiving means senses and measures interference induced by the first through and measurement beams reflected at the temperature measurement target and the reference beam reflected at the reference beam reflecting means.