Temperature / thickness measuring device, temperature / thickness measurement method, temperature / thickness measurement system, control system, control method

摘要

PROBLEM TO BE SOLVED: To provide a measuring device capable of measuring temperature or thickness of a plurality of objects to be measured at once, without forming hole, through which measuring light pass to each object to be measured to avoid the trouble of having to install a device.;SOLUTION: The temperature/thickness measuring device is equipped with an illuminant 110 irradiating light of wavelength possible of transmitting through and reflected from each object to be measured T₁ to T_n, a splitter 120 splitting the light from the illuminant into measuring light and reference light, a reference light reflecting means 140 (for example, reference mirror) reflecting the reference light from the splitter, an optical length modulating means (for example, a driving means driving the reference mirror) 142 modulating optical length of the reference light reflected from the reference light reflecting means, and an optical receiver 150 measuring interference of light between the reference light reflected from the reference light reflecting means for irradiation with the reference light from the splitter toward the reference light reflecting means and each measuring light reflected from each object to be measured for irradiation with measuring light from the splitter toward a plurality of objects to be measured so as to transmit through each object to be measured.;COPYRIGHT: (C)2006,JPO&NCIPI