The table for receiving a workpiece to be worked, as well as a process for the processing of a part to be worked on a table of the genus

摘要

Table for the receipt of a peu00e7aa worked on, as well as a process for the processing of a part to be worked on a table of this genus.The present invention relates to a device for treatment of a part to be worked on, especially of a substrate in essence plan, with a table (2) to support the piece to be worked (5), and a production device of the flow (6, 11), produces a stream of gas in La The upper (17.1, 17.2) of the table (2), in a region between the part to be worked (5) and the upper side (17.1, 17.2) of the table (2), on which the gas stream is supported at the part to be worked (5) during the treatment.