Rotary indexing machine for electron beam processing of workpieces, comprises an intermittent, rotatory workpiece table, and workpiece chambers for receiving the workpiece with a loading opening

摘要

The rotary indexing machine comprises an intermittent, rotatory workpiece table, and workpiece chambers for receiving the workpiece with a loading opening. A fixed carrier element is assigned in a distance on the workpiece table. The sides of dirt wiper and or sealing element turned to the workpiece table are equipped on the carrier element. The sealing element forms a working chamber and a pre-chamber surrounding the working chamber and both the chambers are evacutably equipped by an opening equipped on a carrier element and a pump suction tube in connection with a vacuum pump. The rotary indexing machine comprises an intermittent, rotatory workpiece table, and workpiece chambers for receiving the workpiece with a loading opening. A fixed carrier element is assigned in a distance on the workpiece table. The sides of dirt wiper and or sealing element turned to the workpiece table are equipped on the carrier element. The sealing element forms a working chamber and a pre-chamber surrounding the working chamber and both the chambers are evacutably equipped by an opening equipped on a carrier element and a pump suction tube in connection with a vacuum pump. The openings of the individual workpiece chambers are positionable under a boring arranged in the carrier element in the working chamber at corresponding rotation of the workpiece table. The working chamber is assigned an electron radiation source. External and internal sealing elements are equipped on the carrier element for forming a compensation chamber (7) holding a pump suction tube (20). Sealing elements forming the loading chamber (10) external of the compensation chamber are arranged as sealing elements limiting the prechamber and as sealing element enclosing the loading chamber. The external of the compensation chamber comprises an external dirt wiper and an internal dirt wiper and/or loading chamber (10) and working chamber is assigned respectively with dirt wipers. The sealing elements are arranged in ring shape. The sealing elements consist of circular outer contour. The dirt wipers are ring-shaped and resiliently mounted and consist of brass. An independent claim is included for a method for operating a rotary indexing machine for electron beam processing of workpieces.