首页> 外国专利> FIELD MICROSCOPE FOR THE EXAMINATION OF EMISSION AREAS ON THE SURFACEOF COLD FLAT CATHODES

FIELD MICROSCOPE FOR THE EXAMINATION OF EMISSION AREAS ON THE SURFACEOF COLD FLAT CATHODES

机译:用于检查冷平阴极表面发射区的现场显微镜

摘要

Subject of the invention is a field microscope for the examination of emission areas on the surface of cold flat cathodes. This is a new instrument which enables magnitude measurements of the emitted electric current originating from the individual emission spot on the surface of a cold cathode and at the same time its monitoring regarding emission current at the level of atomic resolution. The microscope according to the invention is characterised in that the examined flat cold cathode (6) at zero potential is located across the hand of the manipulating device (7) which enables XYZ shifting of the cathode within the container, where prior to the measurement an ultra high vacuum has been generated, transmitting electrons from individual emitters in the direction of the hollow metal cone (8) which is terminated on top by a shutter inside a ball-shaped cap (9) on the positive potential being by an electric field focused on a flat luminescent screen (10) featuring an equal or higher positive potential where these electrons are monitored or captured by a CCD camera (11) as an emission sample. The advantage of the microscope according to the invention is that it creates a uniform electronic field only in the very proximity of the screen which is located on top of the ball-shaped cap where the electrons are directed inside a weak electric field towards the screen. The electric field with a radial distance from the screen decreases which contributes to a favourable ratio between the emitted and screen- focused current. By moving the sample on a selected distance Z, an XY display of the distribution of the emission locations across an extensive cathode can be created.
机译:本发明的主题是一种用于检查冷的扁平阴极表面上的发射区域的场显微镜。这是一种新仪器,可以对源自冷阴极表面上单个发射点的发射电流进行幅度测量,并同时以原子分辨率的水平监控发射电流。根据本发明的显微镜的特征在于,处于零电势的被检查的扁平冷阴极(6)位于操纵装置(7)的手的两端,这使得能够使容器内的阴极进行XYZ移动,在测量之前,产生了超高真空,从单个发射器向中空金属锥(8)方向传输电子,该金属锥通过球形帽(9)内的百叶窗在顶部终止,正向电势由电场聚焦在具有相等或更高正电位的平面发光屏(10)上,其中这些电子由CCD摄像机(11)监视或捕获为发射样品。根据本发明的显微镜的优点在于,它仅在屏幕的非常近的位置上才产生均匀的电场,该屏幕位于球形帽的顶部,在此处,电子在弱电场内被导向屏幕。距屏幕径向距离的电场减小,这有助于在发射电流和屏幕聚焦电流之间形成良好的比率。通过在选定的距离Z上移动样品,可以创建跨宽大阴极的发射位置分布的XY显示。

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